Verification System

IVS Image Review and ICS High-Magnification Defect Verification System
Integrated Defect Verification

From Detection to Final Decision, One Integrated Verification System

Integrating AI filtering with IVS and ICS to streamline defect review and support reliable final decisions.

AI filtering helps reduce false-positive review workloads.

IVS enables image-based defect review and supports OK/NG decisions.

ICS provides high-magnification verification of selected defects, helping improve the reliability of final decisions.

Product highlights

IVS

Color defect image review

Overkill reduction, true defect confirmation, Auto IVS filtering integration

ICS

0.345 um/pixel

All-in-Focus high-resolution images and Pseudo 3D View

Product inquiry

Details

IVS

Image-based Verification System

An image-based verification system that uses original color defect images from AVI to review false positives and support rapid identification of actual defects.

  • Uses original AVI color defect images to reduce false positives and verify actual defects.
  • Can be integrated with Pixel AI automated defect filtering to improve review efficiency.
  • Supports integration into contactless verification workflows that minimize additional product handling.
ICS

Image Capturing System

A high-magnification verification system that recaptures challenging defects at high resolution. All-in-Focus and Pseudo 3D View features support detailed defect review and reliable final decisions.

  • Optical Resolution: 0.69 µm/pixel / FOV: 1,004 × 750 µm
  • Image Capture Time: 1.5 sec/point
  • All-in-Focus image capture with a 10× objective lens
  • Non-contact high-magnification defect review and Pseudo 3D View
Non-Contact Verification

IVS, Auto-IVS & ICS Verification Workflow

By minimizing additional product handling and integrating image-based defect review, automated decision support, and high-magnification verification, PIXEL improves verification efficiency and the reliability of final decisions.

01

IVS Image Review

Uses defect images captured by AVI to review false positives, measure defect dimensions, identify defect categories, and support OK/NG decisions.

02

Auto-IVS Decision Workflow

Integrates rule-based inspection, AI filtering, and human verification to streamline defect decisions while reducing review workloads and the risk of defect escape.

03

ICS High-Magnification Verification

Recaptures defects requiring further examination using high-magnification All-in-Focus imaging to support detailed defect verification and reliable final decisions.

ICS Optics

Precision Verification with 2D and Pseudo 3D Views

ICS combines high-magnification 2D imaging with Pseudo 3D View to provide a more intuitive understanding of fine defect features and support accurate defect decisions.

2D ViewPseudo 3D ViewAll-in-Focus10× Objective LensNon-Contact Verification
  • Enables high-magnification reinspection of fine defects that are difficult to evaluate using IVS images alone.
  • Can be configured as an alternative to conventional VRS-based high-magnification verification workflows, depending on inspection requirements.
  • Integrates with IVS to identify defects requiring further review and improve verification efficiency.