Panel AVI

Panel AVI inspection equipment
Featured model

High-resolution color, UV, IR, and dent inspectionPanel AVI

Acts as the gatekeeper at the panel-level mid-process stage.

Panel AVI expandable from color inspection to specialty optics

Built on color inspection with extensions to UV, IR, and other specialty wavelengths—applicable across PSR, ABF, VHP, CZ, and other process stages in the Panel AVI product line.

Product highlights

Resolution range

2-5 Um/Pixel

Multi-wavelength support: Color, UV, IR

Applicable processes

ABF / PSR / CZ / VHP

Automation support for FOUP, Tray, Box

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Panel AVI product specifications

Color Panel AVI

P-400CA

Dual-side auto flip panel-in-tray configuration for post-PSR processes.

  • Cu exposure ≥ 15 um
  • Color: 2.5 um/pixel
  • Multi-angle white LED
  • Metal / SR / bump, 240 sec/panel
  • System size: 2,956(W) x 2,725(D) x 2,200(H) mm
UV + Color Panel AVI

P-400HUV

Hybrid optics for post-CZ processes to separate DFR residue and fluorescence-based defects.

  • Dry film residue ≥ 10 um
  • UV and multi-angle white LED
  • Normal: 110 sec/panel, HR: 520 sec/panel
  • UV and Color: 2.5-5 um/pixel
  • All inside panel (unit + dummy area)
  • System size: 3,822(W) x 2,632(D) x 2,237(H) mm
IR + Color Panel AVI

P-400CIRA

IR hybrid optics for post-PSR processes covering short under SR, open / short, and Cu exposure.

  • Cu exposure, open/short ≥ 15 um
  • IR and multi-angle white LED
  • Normal: 120 sec/panel, HR: 250 sec/panel
  • IR and Color: 2.5-5 um/pixel
  • Metal / SR
  • System size: 3,822(W) x 2,632(D) x 2,237(H) mm
Manual Type

P-400C

One-side manual panel inspection configuration for post-PSR processes.

  • Cu exposure ≥ 15 um
  • Multi-angle white LED
  • Normal: 60 sec/side, HR: 85 sec/side
  • Color: 2.5, 3 um/pixel
  • Metal / SR / bump
  • System size: 1,280(W) x 2,635(D) x 1,900(H) mm