P-400CA
Dual-side auto flip panel-in-tray configuration for post-PSR processes.
- Cu exposure ≥ 15 um
- Color: 2.5 um/pixel
- Multi-angle white LED
- Metal / SR / bump, 240 sec/panel
- System size: 2,956(W) x 2,725(D) x 2,200(H) mm

Acts as the gatekeeper at the panel-level mid-process stage.
Panel AVI expandable from color inspection to specialty optics
Built on color inspection with extensions to UV, IR, and other specialty wavelengths—applicable across PSR, ABF, VHP, CZ, and other process stages in the Panel AVI product line.
Product highlights
Resolution range
2-5 Um/Pixel
Multi-wavelength support: Color, UV, IR
Applicable processes
ABF / PSR / CZ / VHP
Automation support for FOUP, Tray, Box
Dual-side auto flip panel-in-tray configuration for post-PSR processes.
Hybrid optics for post-CZ processes to separate DFR residue and fluorescence-based defects.
IR hybrid optics for post-PSR processes covering short under SR, open / short, and Cu exposure.
One-side manual panel inspection configuration for post-PSR processes.